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dc.contributor.authorSun, Baishun
dc.contributor.authorXie, Chenchen
dc.contributor.authorQu, Kaige
dc.contributor.authorCao, Liang
dc.contributor.authorYan, Jin
dc.contributor.authorWang, Ying
dc.contributor.authorTian, Liguo
dc.contributor.authorZhang, Wenxiao
dc.contributor.authorWang, Zuobin
dc.identifier.citationSun B, Xie C, Qu K, Cao L, Yan J, Wang Y, Tian L, Zhang W, Wang Z (2021) 'Tapping atomic force microscopy imaging at phase resonance', 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Xi'an, China, IEEE.en_US
dc.description.abstractTapping atomic force microscope (TM-AFM) can measure soft samples, which has the advantages of low loss and high resolution, and has been widely used in the characterization of soft micro-nano materials by atomic force microscope (AFM). The phase image in TM-AFM contains sample properties, and it is an important method to characterize the sample by TM-AFM. At present, researchers usually select the frequency near the first resonance peak of the probe to drive its vibration to carry out scanning imaging. However, the phase sensitivity near the first-order resonance of the probe is not high. Therefore, the phase image of TM-AFM is also less sensitive to characterize micro-nano materials. In order to improve the phase sensitivity of the probe, the probe working at the phase resonance peak was selected in this paper to improve the phase sensitivity of the probe vibration and the imaging quality of TM-AFM phase image. The experimental results show that the phase image of phase resonance-atomic force microscope (PR-AFM) can provide not only the surface information but also the structure information of the sample subsurface. PR-AFM can be applied for better characterization of micro and nano materials.en_US
dc.description.sponsorshipThis work was supported by National Key R&D Program of China (No. 2017YFE0112100), EU H2020 Program (MNR4SCell No. 734174; NanoStencil No. 767285), Jilin Provincial Science and Technology Program (Nos. 2020C022-1, 20190201287JC, 20190702002GH and 20200901011SF), Jilin Province Education Department Program (Nos. JJKH20210833KJ), and “111” Project of China (No. D17017).en_US
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International*
dc.subjectatomic force acoustic microscopyen_US
dc.subjectsoft samplesen_US
dc.subjectsoft micronanomaterialsen_US
dc.subjectsample propertiesen_US
dc.subjectscanning imagingen_US
dc.subjectphase sensitivityen_US
dc.subjectfirst-order resonanceen_US
dc.subjectphase resonance peaken_US
dc.subjectprobe vibrationen_US
dc.subjectimaging qualityen_US
dc.subjectTM-AFM phase imageen_US
dc.subjectphase resonance-atomic force microscopeen_US
dc.subjectSubject Categories::J900 Others in Technologyen_US
dc.titleTapping atomic force microscopy imaging at phase resonanceen_US
dc.typeConference papers, meetings and proceedingsen_US
dc.contributor.departmentChangchun University of Science and Technologyen_US
dc.contributor.departmentUniversity of Bedfordshireen_US
dc.description.noteDate of acceptance: 1/7/2021 Electronic ISSN: 2694-510X Print on Demand(PoD) ISSN: 2373-5422 not in sherpa romeo but see, posting accepted version to repository is allowed

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