atomic force acoustic microscopy
phase resonance peak
TM-AFM phase image
phase resonance-atomic force microscope
Subject Categories::J900 Others in Technology
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AbstractTapping atomic force microscope (TM-AFM) can measure soft samples, which has the advantages of low loss and high resolution, and has been widely used in the characterization of soft micro-nano materials by atomic force microscope (AFM). The phase image in TM-AFM contains sample properties, and it is an important method to characterize the sample by TM-AFM. At present, researchers usually select the frequency near the first resonance peak of the probe to drive its vibration to carry out scanning imaging. However, the phase sensitivity near the first-order resonance of the probe is not high. Therefore, the phase image of TM-AFM is also less sensitive to characterize micro-nano materials. In order to improve the phase sensitivity of the probe, the probe working at the phase resonance peak was selected in this paper to improve the phase sensitivity of the probe vibration and the imaging quality of TM-AFM phase image. The experimental results show that the phase image of phase resonance-atomic force microscope (PR-AFM) can provide not only the surface information but also the structure information of the sample subsurface. PR-AFM can be applied for better characterization of micro and nano materials.
CitationSun B, Xie C, Qu K, Cao L, Yan J, Wang Y, Tian L, Zhang W, Wang Z (2021) 'Tapping atomic force microscopy imaging at phase resonance', 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Xi'an, China, IEEE.
TypeConference papers, meetings and proceedings
SponsorsThis work was supported by National Key R&D Program of China (No. 2017YFE0112100), EU H2020 Program (MNR4SCell No. 734174; NanoStencil No. 767285), Jilin Provincial Science and Technology Program (Nos. 2020C022-1, 20190201287JC, 20190702002GH and 20200901011SF), Jilin Province Education Department Program (Nos. JJKH20210833KJ), and “111” Project of China (No. D17017).
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