Fabrication of Pt nanowires with a diffraction-unlimited feature size by high-threshold lithography
Authors
Li, LiWang, Zuobin
Li, Wenjun
Peng, Kuiqing
Zhang, Ziang
Yu, Miao
Song, Zhengxun
Weng, Zhankun
Wang, Dapeng
Zhao, Le
Affiliation
Changchun University of Science and TechnologyUniversity of Bedfordshire
Beijing Normal University
Issue Date
2015-09-29Subjects
nanowires
Metadata
Show full item recordAbstract
Although the nanoscale world can already be observed at a diffraction-unlimited resolution using far-field optical microscopy, to make the step from microscopy to lithography still requires a suitable photoresist material system. In this letter, we consider the threshold to be a region with a width characterized by the extreme feature size obtained using a Gaussian beam spot. By narrowing such a region through improvement of the threshold sensitization to intensity in a high-threshold material system, the minimal feature size becomes smaller. By using platinum as the negative photoresist, we demonstrate that high-threshold lithography can be used to fabricate nanowire arrays with a scalable resolution along the axial direction of the linewidth from the micro- to the nanoscale using a nanosecond-pulsed laser source with a wavelength λ0 = 1064 nm. The minimal feature size is only several nanometers (sub λ0/100). Compared with conventional polymer resist lithography, the advantages of high-threshold lithography are sharper pinpoints of laser intensity triggering the threshold response and also higher robustness allowing for large area exposure by a less-expensive nanosecond-pulsed laser.Citation
Li L, Wang Z, Li W, Peng K, Zhang Z, Yu M, Song Z, Weng Z, Wang D, Zhao L (2015) 'Fabrication of Pt nanowires with a diffraction-unlimited feature size by high-threshold lithography', Applied Physics Letters, 107 (13)Publisher
American Institute of Physics Inc.Journal
Applied Physics LettersAdditional Links
https://aip.scitation.org/doi/10.1063/1.4932095Type
ArticleLanguage
enISSN
0003-6951ae974a485f413a2113503eed53cd6c53
10.1063/1.4932095