Fabrication of Pt nanowires with a diffraction-unlimited feature size by high-threshold lithography
AffiliationChangchun University of Science and Technology
University of Bedfordshire
Beijing Normal University
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AbstractAlthough the nanoscale world can already be observed at a diffraction-unlimited resolution using far-field optical microscopy, to make the step from microscopy to lithography still requires a suitable photoresist material system. In this letter, we consider the threshold to be a region with a width characterized by the extreme feature size obtained using a Gaussian beam spot. By narrowing such a region through improvement of the threshold sensitization to intensity in a high-threshold material system, the minimal feature size becomes smaller. By using platinum as the negative photoresist, we demonstrate that high-threshold lithography can be used to fabricate nanowire arrays with a scalable resolution along the axial direction of the linewidth from the micro- to the nanoscale using a nanosecond-pulsed laser source with a wavelength λ0 = 1064 nm. The minimal feature size is only several nanometers (sub λ0/100). Compared with conventional polymer resist lithography, the advantages of high-threshold lithography are sharper pinpoints of laser intensity triggering the threshold response and also higher robustness allowing for large area exposure by a less-expensive nanosecond-pulsed laser.
CitationLi L, Wang Z, Li W, Peng K, Zhang Z, Yu M, Song Z, Weng Z, Wang D, Zhao L (2015) 'Fabrication of Pt nanowires with a diffraction-unlimited feature size by high-threshold lithography', Applied Physics Letters, 107 (13)
PublisherAmerican Institute of Physics Inc.
JournalApplied Physics Letters