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dc.contributor.authorSun, Baishun
dc.contributor.authorCao, Liang
dc.contributor.authorXie, Chenchen
dc.contributor.authorSong, Zhengxun
dc.contributor.authorLu, Zhengcheng
dc.contributor.authorWeng, Zhankun
dc.contributor.authorWang, Zuobin
dc.date.accessioned2020-08-13T11:57:30Z
dc.date.available2020-08-13T11:57:30Z
dc.date.issued2020-04-27
dc.identifier.citationSun B., Cao L., Lu Z., Xie C., Song Z., Weng Z., Wang Z. (2020) 'Modeling and correction of image pixel hysteresis in atomic force microscopy', Ultramicroscopy, 213en_US
dc.identifier.issn0304-3991
dc.identifier.pmid32387681
dc.identifier.doi10.1016/j.ultramic.2020.112992
dc.identifier.urihttp://hdl.handle.net/10547/624389
dc.description.abstractIn an atomic force microscope (AFM) system, the measurement accuracy in the scan images is determined by the displacement accuracy of piezo scanner. The hysteresis model of piezo scanner displacement is complex and difficult to correct, which is the main reason why the output displacement of the piezo scanner does not have high precision. In this study, an image pixel hysteresis model of the piezo scanner displacement in the AFM system was established. An AFM was used to scan a two-dimensional (2D) grating in the 0 ° and 90 ° directions and a polynomial fitting method was employed to obtain the image pixel hysteresis model parameters of the piezo scanner displacement in the X-direction and Y-direction. The image pixel hysteresis model was applied to correct the AFM scan image of regular octagons. The results showed that the relative measurement error in the X-direction was decreased from 12.47% to 0.52% after the correction and that in the Y-direction decreased from 28.57% to 0.35%. The image pixel hysteresis model can be applied in the post-processing software of a commercial AFM system. The model solves the hysteresis problem of the AFM system and improves the measuring accuracy of AFM in 2 degrees of freedom (2 DOF).en_US
dc.language.isoenen_US
dc.publisherElsevier B.V.en_US
dc.relation.urlhttps://www.sciencedirect.com/science/article/abs/pii/S0304399119303444en_US
dc.rightsGreen - can archive pre-print and post-print or publisher's version/PDF
dc.subjectmeasurement accuracyen_US
dc.subjectatomic force microscopyen_US
dc.subjectimage pixel hysteresis modelen_US
dc.titleModeling and correction of image pixel hysteresis in atomic force microscopyen_US
dc.typeArticleen_US
dc.contributor.departmentChangchun University of Science and Technologyen_US
dc.contributor.departmentJilin Medical Universityen_US
dc.contributor.departmentUniversity of Bedfordshireen_US
dc.identifier.journalUltramicroscopyen_US
dc.date.updated2020-08-13T11:53:08Z
dc.description.note


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