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    Periodic antireflection surface structure fabricated on silicon by four-beam laser interference lithography

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    Authors
    Zhang, Ziang
    Wang, Zuobin
    Wang, Di
    Ding, Yu-jie
    Affiliation
    Changchun University of Science and Technology
    University of Bedfordshire
    Issue Date
    2013-12-31
    Subjects
    Laser interference lithography
    
    Metadata
    Show full item record
    Abstract
    Silicon surface structures with excellent antireflection property arouse wide interest. Chemical and physical methods such as femtosecond, nanosecond, and picosecond laser processing, wet-chemical etching, electrochemical etching, and reactive ion etching have been developed to fabricate them. However, the methods can only produce a quasi-ordered array of sharp conical microspikes on silicon surface. In this paper, we present a method to fabricate periodic silicon antireflection surface structures using direct four-beam laser interference lithography (LIL). With 1 atm ambient atmosphere of SF6 and the laser fluence of the four beams irradiated on the silicon surface at 0.64 J cm-2, the periodical conical spikes were generated. Changing the polarization directions of the opposite incident beam pairs in a four-beam LIL system could convert conical spikes structure into an array of holes. Antireflection in a wide spectral range was measured by a spectrophotometer from ultraviolet to near-infrared. The average reflectance of this periodic black silicon surface is less than 3.5%. © 2014 Laser Institute of America.
    Citation
    Zhang Z, Wang Z, Wang D, Ding Y (2014) 'Periodic antireflection surface structure fabricated on silicon by four-beam laser interference lithography', Journal of Laser Applications, 26 (1), pp.012010.
    Publisher
    Laser Institute of America
    Journal
    Journal of Laser Applications
    URI
    http://hdl.handle.net/10547/624289
    DOI
    10.2351/1.4849715
    Additional Links
    https://lia.scitation.org/doi/10.2351/1.4849715
    Type
    Article
    Language
    en
    ISSN
    1042-346X
    ae974a485f413a2113503eed53cd6c53
    10.2351/1.4849715
    Scopus Count
    Collections
    Computing

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