Fast Fourier transport analysis of surface structures fabricated by laser interference lithography
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AbstractThis paper presents an FFT (fast Fourier transform) analytical method for the study of surface structures fabricated by laser interference lithography (LIL). In the work, the FFT analytical method combined with Gaussian fitting is used to determine the periods and pattern distributions of surface structures from frequency spectra. For LIL, the processing parameters of incident and azimuth angles can be obtained corresponding to the period and pattern distribution. This work facilitates the detection of micro- and nano-structures, the analysis of pattern distribution in engineering, and the processing error analysis of LIL.
CitationLiu M, Dong L, Zhang Z, L Li, Wang L, Song Z, Weng Z, Han X, Zhou L, Wang Z (2019) 'Fast Fourier transport analysis of surface structures fabricated by laser interference lithography', Applied Physics Express, 12 (9), pp.096503-.
PublisherThe Japan Society of Applied Physics
JournalApplied Physics Express
Sponsors111 Project of China: No.D17017; National Key R&D Program of China: No.2016YFE0112100; Horizon 2020 Framework Programme: FabSurfWAR No.644971, NanoStencil No.767285; Jilin Provincial Science and Technology Program: No. 20190702002GH, No.20160623002TC, No.20180414002GH, No.20180414081GH, No.20180520203JH; National Natural Science Foundation of China: No.11504030.
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