Antireflection silicon structures with hydrophobic property fabricated by three-beam laser interference
AffiliationChangchun University of Science and Technology
University of Bedfordshire
Subjectsthree-beam laser interference
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AbstractThis paper demonstrates antireflective structures on silicon wafer surfaces with hydrophobic property fabricated by three-beam laser interference. In this work, a three-beam laser interference system was set up to generate periodic micro-nano hole structures with hexagonal distributions. Compared with the existing technologies, the array of hexagonally-distributed hole structures fabricated by three-beam laser interference reveals a design guideline to achieve considerably low solar-weighted reflectance (SWR) in the wavelength range of 300-780 nm. The resulting periodic hexagonally-distributed hole structures have shown extremely low SWR (1.86%) and relatively large contact angle (140°) providing with a self-cleaning capability on the solar cell surface.
CitationZhao L., Wang Z., Zhang J., Cao L., Li L., Yue Y., Li D. (2015) 'Antireflection silicon structures with hydrophobic property fabricated by three-beam laser interference', Applied Surface Science, 346, pp.574-579.
JournalApplied Surface Science
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