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    Superhydrophobic dual micro- and nanostructures fabricated by direct laser interference lithography

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    Authors
    Li, Wenjun
    Wang, Zuobin
    Wang, Dapeng
    Zhang, Ziang
    Zhao, Le
    Li, Dayou
    Qiu, Renxi
    Maple, Carsten
    Affiliation
    University of Bedfordshire
    Changchun University of Science and Technology
    Issue Date
    2014
    Subjects
    laser interference lithography
    fabrication of nanostructures
    nanostructures
    
    Metadata
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    Abstract
    A method for the fabrication of highly ordered superhydrophobic dual micro- and nanostructures on silicon by direct laser interference lithography (LIL) is presented. The method offers its innovation that the superhydrophobic dual micro- and nanostructures can be fabricated directly by controlling the process of four-beam laser interference and the use of hydrofluoric acid (HF) to wipe off the silica generated during the process. Different laser fluences, exposure durations, and cleanout times have been investigated to obtain the optimum value of the contact angle (CA). The superhydrophobic surface with the CA of 153.2 deg was achieved after exposure of 60 s and immersion in HF with a concentration of 5% for 3 min. Compared with other approaches, it is a facile and efficient method with its significant feature for the macroscale fabrication of highly ordered superhydrophobic dual micro- and nanostructures on silicon.
    Citation
    Li W, Wang Z., Wang D, Zhang Z., Zhao L., Li D., and Qiu R. (2014) 'Superhydrophobic dual micro- and nanostructures fabricated by direct laser interference lithography', Optical Engineering 53(3): 034109
    Publisher
    Society of Photo-optical Instrumentation Engineers (SPIE)
    Journal
    Optical Engineering
    URI
    http://hdl.handle.net/10547/336059
    DOI
    10.1117/1.OE.53.3.034109
    Additional Links
    http://opticalengineering.spiedigitallibrary.org/article.aspx?doi=10.1117/1.OE.53.3.034109
    Type
    Article
    Language
    en
    ISSN
    0091-3286
    ae974a485f413a2113503eed53cd6c53
    10.1117/1.OE.53.3.034109
    Scopus Count
    Collections
    Centre for Research in Distributed Technologies (CREDIT)

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